设备名称 Equipment Name

全自动石墨舟装卸片机  Automatic Wafer Handling System for PECVD

设备型号 Equipment Model

SMZ-IV

设备用途 Equipment Application

本设备为在线式，可与一台或两台侧出舟设备对接，实现石墨舟的自动传输和硅片自动装卸，满足在太阳能电池片生产过程中的PECVD工艺前后，将片篮中的硅片自动装载到石墨舟，并将石墨舟输送到PECVD设备中，或将PECVD设备中的石墨舟输送到本设备，并将石墨舟中的硅片自动装载到片篮中。

Inline equipment, which can be integrated with one or two  boat-boat interface PECVD equipment and realize the transportation of graphite boat and wafers load & unload automatically. This equipment can be applied in the process before and after PECVD process, which can load the wafers from the cassette to the graphite boat and transport the fulfilled boat to the PECVD equipment or transport the processed boat to this equipment and unload the wafers from the graphite boat to the cassette automatically. 

技术特点  Features

1、设备模块化设计，可以在线连接⼀台或两台PECVD。
With modular design,which can inline integrated with one or two sets of PECVD equipment.

2、采用PC机控制，平板电脑菜单操作，简单明了。
With PC control,tablet computer operation,which is easy and clear for operation.

3、具有在线隐裂⽚检测、在线膜厚检测、在线色差检测、在线CCD翘片检测及NG片自动处理功能（选配功能，价格另计）。
Online micro-crack detection,film thickness detection,color inspection system,online CCD wafer warpage detection and automatic dealing with NG wafers(need extra charges).

4、在线/离线配置。
Inline/offline configuration.

5、匹配AGV,RFID,可选配MES功能。

Compatible with AGV,RFID system,MES function optional.

设备参数  Parameters